{"id":47,"date":"2019-02-20T12:00:52","date_gmt":"2019-02-20T03:00:52","guid":{"rendered":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/?page_id=47"},"modified":"2019-06-12T15:08:58","modified_gmt":"2019-06-12T06:08:58","slug":"facility","status":"publish","type":"page","link":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/facility","title":{"rendered":"Facilities"},"content":{"rendered":"

Oxide TFT fabrication facility (Ito campus)<\/h3>\n

\"\"<\/p>\n

Dry process:<\/h5>\n

Sputter<\/a>, Dry Etcher<\/a>, CVD<\/a>, Annealer<\/a><\/p>\n

Wet process:<\/h5>\n

Wet Etcher<\/a>, Remover<\/a>, Glass Cleaner<\/a>, Mask Cleaner<\/a><\/p>\n

Lithography process<\/h5>\n

Mask Aligner<\/a>, Spin Coater<\/a>, Developer<\/a>, Bakeout oven<\/a><\/p>\n

printing process<\/h5>\n

Spin coater<\/a>, Screen Printer<\/a>, Ink-Jet printer<\/a>, Encapsulation system<\/a><\/p>\n

2nd Cleanroom (GIC)<\/h3>\n

\"\"<\/p>\n

Electric device measurement room<\/h3>\n

Electronic workshop<\/h3>\n

Softwears<\/h3>\n
    \n
  • \n
      \n
    • JDAT : SX-Meister, Ismo, Asca<\/li>\n
    • CADENCE : OrCAD, Virtuoso, Allegro<\/li>\n
    • SILVACO : TCAD, Analog\/Mixed Signal\/RF, Custom IC CAD<\/li>\n
    • INFOLYTICA : ElecNet, MagNet<\/li>\n
    • MATHWORKS : MATLAB, Symulinks<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"

      Oxide TFT fabrication facility (Ito campus) Dry process: Sputter, Dry Etcher, CVD, Annealer Wet process: Wet Etcher, Remover, Glass Cleaner, Mask Cleaner Lithography process Mask Aligner, Spin Coater, Developer, Bakeout oven printing process Spin coater, Screen Printer, Ink-Jet printer, Encapsulation system 2nd Cleanroom (GIC) Electric device measurement room Electronic workshop Softwears JDAT : SX-Meister, Ismo, Asca CADENCE : OrCAD, Virtuoso, Allegro SILVACO : TCAD, Analog\/Mixed… <\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":4,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-47","page","type-page","status-publish","hentry","clearfix"],"_links":{"self":[{"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/wp-json\/wp\/v2\/pages\/47","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/wp-json\/wp\/v2\/comments?post=47"}],"version-history":[{"count":6,"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/wp-json\/wp\/v2\/pages\/47\/revisions"}],"predecessor-version":[{"id":340,"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/wp-json\/wp\/v2\/pages\/47\/revisions\/340"}],"wp:attachment":[{"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/e\/wp-json\/wp\/v2\/media?parent=47"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}