{"id":47,"date":"2019-02-20T12:00:52","date_gmt":"2019-02-20T03:00:52","guid":{"rendered":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/?page_id=47"},"modified":"2024-04-19T10:32:04","modified_gmt":"2024-04-19T01:32:04","slug":"facility","status":"publish","type":"page","link":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/facility","title":{"rendered":"\u7814\u7a76\u8a2d\u5099"},"content":{"rendered":"<h3>\u9178\u5316\u7269\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u4f5c\u88fd\u8a2d\u5099\uff08\u4f0a\u90fd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09<\/h3>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-277 alignnone\" src=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_ALL-700x509.png\" alt=\"\" width=\"457\" height=\"333\" srcset=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_ALL-700x509.png 700w, https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_ALL-300x218.png 300w, 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href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_MaskCleaner.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u30de\u30b9\u30af\u6d17\u6d44\u88c5\u7f6e<\/a><\/p>\n<h5>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30d7\u30ed\u30bb\u30b9\uff1a<\/h5>\n<p style=\"padding-left: 40px;\"><a href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_MaskAligner.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u9732\u5149\u88c5\u7f6e<\/a>\u3001<a href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_SpinCoater.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u5857\u5e03\u88c5\u7f6e<\/a>\u3001<a href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_Developer.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u73fe\u50cf\u88c5\u7f6e<\/a>\u3001<a href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_Bakeout.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u30d9\u30fc\u30af\u88c5\u7f6e<\/a><\/p>\n<h5>\u30d7\u30ea\u30f3\u30c8\u30d7\u30ed\u30bb\u30b9\uff1a<\/h5>\n<p style=\"padding-left: 40px;\"><a href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_SpinCoating.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u5857\u5e03\u88c5\u7f6e<\/a>\u3001<a href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_ScreenPrinting.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u30b9\u30af\u30ea\u30fc\u30f3\u5370\u5237\u88c5\u7f6e<\/a>\u3001<a href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_InkJetPrinting.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u30a4\u30f3\u30af\u30b8\u30a7\u30c3\u30c8\u88c5\u7f6e<\/a>\u3001<a href=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/IGZO_Encapsulation.png\" target=\"_blank\" rel=\"noopener noreferrer\">\u5c01\u6b62\u88c5\u7f6e<\/a><\/p>\n<h3>\u7b2c\uff11\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\uff08GIC\uff09<\/h3>\n<p><img decoding=\"async\" src=\"https:\/\/www.gic.kyushu-u.ac.jp\/j\/research\/advanced\/image\/g_nakashima02.jpg\" alt=\"\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u5168\u666f\" \/><\/p>\n<h5>\u6210\u819c\u88c5\u7f6e\uff1a<\/h5>\n<p style=\"padding-left: 40px;\">ECR\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u88c5\u7f6e<br \/>\n\u539f\u5b50\u5c64\u5806\u7a4d (ALD) \u88c5\u7f6e<br \/>\n\u8d85\u9ad8\u771f\u7a7a\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u88c5\u7f6e<br \/>\n\u5c0f\u578b\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u88c5\u7f6e<br \/>\n\u4e09\u6e90\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u88c5\u7f6e<br \/>\nAl\u84b8\u7740\u88c5\u7f6e<br \/>\n\u96fb\u5b50\u30d3\u30fc\u30e0\u84b8\u7740\u88c5\u7f6e<\/p>\n<h5>\u71b1\u51e6\u7406\u88c5\u7f6e\u88c5\u7f6e\uff1a<\/h5>\n<p style=\"padding-left: 40px;\">\u6025\u901f\u52a0\u71b1\u88c5\u7f6e (RTA)\u30fb\u30fb\u30fb<\/p>\n<h5>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30d7\u30ed\u30bb\u30b9\uff1a<\/h5>\n<p style=\"padding-left: 40px;\">\u30b9\u30d4\u30ca\u30fc\u3001\u30a2\u30e9\u30a4\u30ca\u30fc\u3001\u30aa\u30fc\u30d6\u30f3\u3001\u9855\u5fae\u93e1\u3001\u30fb\u30fb\u30fb<\/p>\n<h3>\u7b2c\uff12\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\uff08GIC\uff09<\/h3>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-359 alignnone\" src=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/Cleanroom_2nd-700x321.jpg\" alt=\"\" width=\"339\" height=\"156\" srcset=\"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/Cleanroom_2nd-700x321.jpg 700w, https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/Cleanroom_2nd-300x138.jpg 300w, https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/Cleanroom_2nd-768x352.jpg 768w, https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-content\/uploads\/2019\/03\/Cleanroom_2nd.jpg 960w\" sizes=\"auto, (max-width: 339px) 100vw, 339px\" \/><\/p>\n<h5>\u6210\u819c\u88c5\u7f6e\uff1a<\/h5>\n<p style=\"padding-left: 40px;\">DC\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e(\u30ed\u30fc\u30c9\u30ed\u30c3\u30af\u5f0f)<br \/>\n\u71b1\u84b8\u7740\u88c5\u7f6e(\u7279\u6ce8)<br \/>\n\u5e73\u884c\u5e73\u677f\u578bRIE\u88c5\u7f6e (RIE-10NR)<\/p>\n<h5>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30d7\u30ed\u30bb\u30b9\uff1a<\/h5>\n<p style=\"padding-left: 40px;\">\u30b9\u30d4\u30ca\u30fc\u3001\u30a2\u30e9\u30a4\u30ca\u30fc\u3001\u30aa\u30fc\u30d6\u30f3\u3001\u9855\u5fae\u93e1\u3001\u30fb\u30fb\u30fb<\/p>\n<h3>\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u8a08\u6e2c\u5ba4<\/h3>\n<h3>\u96fb\u5b50\u5de5\u4f5c\u5ba4<\/h3>\n<h3>\u30bd\u30d5\u30c8\u30a6\u30a7\u30a2<\/h3>\n<ul>\n<li style=\"list-style-type: none;\">\n<ul>\n<li>JDAT : SX-Meister, Ismo, Asca<\/li>\n<li>CADENCE : OrCAD, Virtuoso, Allegro<\/li>\n<li>SILVACO : TCAD, Analog\/Mixed Signal\/RF, Custom IC CAD<\/li>\n<li>INFOLYTICA : ElecNet, MagNet<\/li>\n<li>MATHWORKS : MATLAB, Symulinks<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>\u9178\u5316\u7269\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u4f5c\u88fd\u8a2d\u5099\uff08\u4f0a\u90fd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09 \u30c9\u30e9\u30a4\u30d7\u30ed\u30bb\u30b9\uff1a \u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u3001\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u3001CVD\u88c5\u7f6e\u3001\u30a2\u30cb\u30fc\u30ea\u30f3\u30b0\u88c5&hellip; <\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":32,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-47","page","type-page","status-publish","hentry","clearfix"],"_links":{"self":[{"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-json\/wp\/v2\/pages\/47","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-json\/wp\/v2\/comments?post=47"}],"version-history":[{"count":41,"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-json\/wp\/v2\/pages\/47\/revisions"}],"predecessor-version":[{"id":1073,"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-json\/wp\/v2\/pages\/47\/revisions\/1073"}],"wp:attachment":[{"href":"https:\/\/csede.kyushu-u.ac.jp\/hattori\/wp-json\/wp\/v2\/media?parent=47"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}