Shared clean room

The Center for Semiconductor and Device Ecology Research and Education (CSeDE) has one of the largest clean rooms in Japan and a group of semiconductor process and device fabrication equipment specialized for research.

Overview

The 200m² clean room with cleanliness class 1,000 (guaranteeing less than 1,000 particles with a diameter of 0.5 microns or more per cubic foot) is equipped with film deposition equipment, heat treatment equipment, photography and etching equipment, and analysis equipment, which are essential for semiconductor process and device fabrication.

Use history

The clean room and equipment have been used to fabricate devices (IV group semiconductors, electronic devices made from two-dimensional materials) and various prototypes (sensors on power device modules, thin film transistors, spin MOS transistors), and a wide range of semiconductor technologies and know-how has been accumulated and maintained based on these achievements.