Functional Device Engineering Laboratory / Kyushu University

1F Cleanroom 1

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Thin film fabrication systems
ECR sputtering system	Atomic Layer Deposition (ALD) system
Ultra high vaccum sputtering system	magnetron sputtering system
magnetron sputtering system (3 targets)	Al thermal evaporation system
Electon beam evaporation system

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Annealing system
Rapid thermal annealing (RTA) system	Furnaces for oxidation and annealing
Furnace for wet oxidation and diffusion	Furnace for high temperature annealing

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Others
Mask aligner (Mikasa Co. Ltd.)	Mask aligner (DNP Co. Ltd.)
Reactive ion etching system	Clean bench
Elipsometory	Optical microscope
Plasma reactor

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